1 Process Control in Laser Material Processing for the Micro and Nanometer Scale Domains

Henry Helvajian

1.1 Introduction

1.2 Laser Processing

1.2.1 Laser Wavelength

1.2.2 Laser Power

1.2.3 Laser Dose

1.2.4 Laser Beam

1.2.5 Laser Pulse Temporal Profile

1.2.6 Pattern Generation

1.3 Possible Steps Forward

1.4 Conclusions

References

2 Theory and Simulation of Laser Ablation - from Basic Mechanisms to Applications

Laurent J Lewis and Danny Perez

2.1 Introduction

2.2 Basic Physics

2.2.1 Light-Matter Interaction

2.2.2 Material Removal from the Target:The Basics of Ablation

2.3 Ablation in the Thermal Regime

2.3.1 Thermodynamics

2.3.2 ConventionalWisdom: Early Theories

2.3.3 A New Understanding

2.3.4 Computer Models

2.3.5 The Femtosecond Regime

2.3.6 Picosecond Pulses and Beyond

2.3.7 Molecular Solids

2.4 Materials Processing

2.4.1 Nanoparticle Production in Solvents

2.4.2 Damages and Heat Affected Zones

2.5 Conclusions and Perspectives

References

3 Laser Devices and Optical Systems for Laser Precision Microfabrication

KunihikoWashio

3.1 Introduction

3.2 Laser Devices

3.2.1 Various Laser Devices from Deep UV andMid-IR Spectral Region

3.2.2 Diode-Pumped High-Brightness Continuous Wave Solid-State Lasers

3.2.3 Q-Switching and Cavity Dumping

3.2.4 Picosecond and Femtosecond, Ultrafast Pulsed Laser Oscillators and Amplifiers

3.3 Optical Systems

3.3.1 Optical Components for Modification and Control of Laser Beams

3.3.2 Optical Systems for Beam Shape Transformation

3.3.3 Galvanometer-Based Optical Scanners

3.3.4 Spatial Light Modulators

3.3.5 Nonlinear-Optical Systems for Harmonic Generation

3.3.6 Optical Systems for Beam Characterization and ProcessMonitoring

3.4 Summary

References

4 Fundamentals of Laser-Material Interaction and Application to Multiscale Surface Modification

Matthew S Brown and Craig B Arnold

4.1 Introduction

4.2 Fundamentals of Laser Surface Processing

4.2.1 Light Propagation in Materials

4.2.2 Energy Absorption Mechanisms

4.2.3 The Heat Equation

4.2.4 Material Response

4.3 Laser Surface Processing Applications

4.4 Case Study I: Surface Texturing for Enhanced Optical Properties

4.5 Case Study II: Surface Texturing for Enhanced Biological Interactions

4.6 Conclusions

References

5 Temporal Pulse Tailoring in Ultrafast Laser Manufacturing Technologies

6 Laser Nanosurgery,Manipulation, and Transportation of Cells and Tissues

7 Laser Synthesis of Nanomaterials

8 Ultrafast Laser Micro-and Nanostructuring

9 3D Fabrication of Embedded Microponents

10 Micromachining and Patterning

11 Laser Transfer Techniques for Digital Microfabrication

12 Hybrid Laser Processing of Transparent Materials

13 Drilling,Cutting,Welding,Marking and Microforming

Index